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無錫臻泰半導體科技有限公司

半導體清洗

半導體清洗用水定額

清洗是什么？主要清洗技術清洗適用圖片

1. 半導體清洗是什么？

半導體清洗是清除客戶社設備配件在生產過程中產生的污染物的工程。
通過多種半導體清洗辦法除去客戶制造工程中發生的污染，延長配件壽命，提高客戶工序的收率，開動率更大化， 為顧客節約成本提供多種半導體清洗解決方案。

半導體清洗用水定額
半導體清洗初期階段
  • 引進半導體配件清洗技術
  • 各材質、各工藝精密清洗
  • 改善物理清洗技術 →
    CO2 Cleaning, Bead, Arc Coating
  • 0.3 ? Size P/C 控制
產品表面處理更優化
  • 提高各種物理清洗技術 →
    符合客戶多樣化的需求
  • 多功能的產品&復合材料的產品清洗
  • 清洗工藝的準確性
  • 0.1 ? Size P/C 控制
引進Nano 半導體清洗技術
  • 表面處理更優化 → 改善工藝收益率
  • 通過增加產品的表面積減少P/C Source
  • 清洗工藝的準確性 → 引進質量管理體系
  • 0.04 ? Size P/C 控制
Nano 半導體清洗技術的發展
  • SMART Factory – Automation
  • 根據不同產品適用不同方案
  • 微細工藝控制 → 減少客戶工藝Defect
  • 環保清洗技術發展
  • 產品壽命增加，Delivery Time 減少
  • 0.01um Size P/C 控制

主要半導體清洗技術

根據客戶的各種工藝和配件提供合適的清洗技術。
不僅去除工藝污染物，還將配件表面 維持在更佳狀態，控制顆粒，為了提供延長產品壽命的更佳解決方案進行堅持不斷地研究開發。

半導體清洗用水定額

CuStrip? CleanPeel? SurFinish? SurfRestore?
使用目的 將適用Cu工藝的配件的母材損傷減至更小，去除工藝污染物 通過將配件損傷減至更小以延長產品壽命 Al CVDShowerhead 母材和HoleDamage 減少 復原Quartz 材質產品的PlasmaEtching表面損傷
效果 減少母材Etch Rate
延長產品壽命		 延長產品壽命 Particle Source減少
維持GasFlowUniformity		 改善Particle
延長產品壽命
適用產品 Al Collimator、Al CoverRing 等 PVD 工藝Shield 類 CVD 工藝Show erhead Quartz Window,
Quartz pedestal等
效果 半導體清洗用水定額 半導體清洗用水定額 半導體清洗用水定額 半導體清洗用水定額

更多半導體清洗適用圖片

半導體清洗用水定額
TEL VIGUS LK2 ESC
半導體清洗用水定額
TRAP..CTR-3ALS1-55
半導體清洗用水定額
TRAP..CTR-3ALS1-55
半導體清洗用水定額
TRAP..CTR-3ALS1-55
半導體清洗用水定額
TRAP..CTR-3ALS1-55
半導體清洗用水定額
TRAP..CTR-3ALS1-55
半導體清洗用水定額
TRAP..CTR-3ALS1-55
半導體清洗用水定額
TRAP..CTR-3ALS1-55
半導體清洗用水定額
UNDER SHIELD DEPO
半導體清洗用水定額
UNDER SHIELD DEPO
半導體清洗用水定額
UNDER SHIELD DEPO 180 V2E
半導體清洗用水定額
UNDER SHIELD DEPO 180 V2E
半導體清洗用水定額
UNDER SHIELD DEPO 180 V2E
半導體清洗用水定額
UNDER SHIELD DEPO 180 V2E
半導體清洗用水定額
UPPER INNER CHAMBER
半導體清洗用水定額
UPPER INNER CHAMBER
半導體清洗用水定額
UPPER INNER CHAMBER
半導體清洗用水定額
UPPER INNER CHAMBER
半導體清洗用水定額
WINDOW(Q).BLANK EPD V2
半導體清洗用水定額
WINDOW(Q).BLANK EPD V2
半導體清洗用水定額
WINDOW(YC).SHIELD DEPO V2
半導體清洗用水定額
WINDOW(YC).SHIELD DEPO V2
半導體清洗用水定額
WINDOW(YC).SHIELD DEPO V2
半導體清洗用水定額
WINDOW(YC).SHIELD DEPO V2
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